JPS6246524Y2 - - Google Patents
Info
- Publication number
- JPS6246524Y2 JPS6246524Y2 JP17944483U JP17944483U JPS6246524Y2 JP S6246524 Y2 JPS6246524 Y2 JP S6246524Y2 JP 17944483 U JP17944483 U JP 17944483U JP 17944483 U JP17944483 U JP 17944483U JP S6246524 Y2 JPS6246524 Y2 JP S6246524Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- chuck surface
- cleaning
- cleaning paper
- paper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 58
- 238000003860 storage Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 description 6
- 238000003754 machining Methods 0.000 description 5
- 239000003595 mist Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Auxiliary Devices For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17944483U JPS6087630U (ja) | 1983-11-18 | 1983-11-18 | チヤツク面清掃装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17944483U JPS6087630U (ja) | 1983-11-18 | 1983-11-18 | チヤツク面清掃装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6087630U JPS6087630U (ja) | 1985-06-15 |
| JPS6246524Y2 true JPS6246524Y2 (en]) | 1987-12-16 |
Family
ID=30389339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17944483U Granted JPS6087630U (ja) | 1983-11-18 | 1983-11-18 | チヤツク面清掃装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6087630U (en]) |
-
1983
- 1983-11-18 JP JP17944483U patent/JPS6087630U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6087630U (ja) | 1985-06-15 |
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